Figure 5
Schematics of (a) shallow donor generation in conventional a-IGZO film, (b) passivation of defects by hydrogen in conventional a-IGZO film. Formation of hydrogen, oxygen, and indium-related states (c)–(f) in a-IGZO films covered with SiNx, and (g)–(h) in a-IGZO films covered with SiOx.
