Figure 1
From: An angle-compensating colorimetric strain sensor with wide working range and its fabrication method
Schematic illustration of the fabrication process for mold and sensor. Nanoparticles were assembled on a silicon substrate then they were etched with RIE process. Metal (Cr) film was deposited in the gap between the particles so that concave structures were fabricated after peeling off the particles. The mold with nano-concave structures were used to fabricate sensor substrate with nano-convex structures.
