Figure 4
From: Using machine learning with optical profilometry for GaN wafer screening
Log scale histogram plot showing the distribution of points in 4 different types of 325 × 325 µm2 regions: (A) An ideal region with a low RMS value in a Gaussian distribution, (B) points are in a Gaussian, but a higher RMS value is measured, (C) a region with low RMS, however there are many outliers outside of the Gaussian indicating a small bump typically resembling a red spot in Fig. 3C, (D) a region with a very large pit typically resembling an area with a red pixel in (B,C).
