Table 2 Wurtzite AlN properties obtained with COMB3\(_{{\mathrm{QTE}}^{+}}^{2022}\) and COMB3\(_{\mathrm{QEq}}^{2016^{*}}\) are compared to the COMB3\(_{{\mathrm{QEq}}}^{2016}\) AlN publication, and DFT as well as experimental findings.

From: Charge-optimized many-body interaction potential for AlN revisited to explore plasma–surface interactions

Wurtzite

COMB3\(_{{\mathrm{QTE}}^{+}}^{2022}\)

COMB3\(_{\mathrm{QEq}}^{2016^{*}}\)

COMB3\(_{\mathrm{QEq}}^{2016}\)

DFT/Exp.

a (Å)

3.14

3.10

3.119

3.1136,37,38, 3.1339,40

c/a

1.60

1.62

1.629

1.6036,37,38,39,40

\(C_{11}\) (GPa)

510

453

4639

34541, 46442

\(C_{12}\) (GPa)

95

87

929

12541, 14942

\(C_{13}\) (GPa)

115

103

1049

11642, 12041

\(C_{33}\) (GPa)

494

463

4379

39541, 40942

\(C_{44}\) (GPa)

223

191

1949

11841, 12842

\(\Delta H_{\mathrm{f}}\) (eV/atom)

− 1.49

− 1.30

− 1.509

− 1.4939, -1.5040, − 1.5738