Table 1 Laser parameters for PMMA-Si micro-bonding.
From: Bonding of PMMA to silicon by femtosecond laser pulses
Parameter | Value |
|---|---|
Pulse energy Ep (μJ) | 1; 1.25; 1.5; 1.75; 2; 2.25; 2.5 |
Repetition rate f (kHz) | 200; 400; 800 |
Scanning speed (mm/s) | 0.01; 0.05; 0.1; 0.5; 1.0 |
Hatch distance h (μm) | 19; 38; 56; 75; 110; 150 |
