Table 2 Parameters values used in the PMMA heating calculation.

From: Bonding of PMMA to silicon by femtosecond laser pulses

Parameter

Value

References

Parameter

Value

References

ρSi

2330 kg/m3

29

ρPMMA

1188 kg/m3

30

cSi

703 J/kg/K

29

cPMMA

1466 J/kg/K

30

DSi

8.8·10–5 m2/s

29

DPMMA

1.09·10–7 m2/s

31

k

0.193 W/m2

30

A

8.9·10–4

22

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