Table 2 Comparison of uniformity predictions from the illumination model and SAGE for the 24, 36, and 60 beam configurations for two different super-Gaussian focal spots.
focal spot | model | laser absorption [%] | laser-target coupling [%] | 24 beams σ rms [%] | 36 beams σ rms [%] | 60 beams σ rms [%] |
|---|---|---|---|---|---|---|
Δ/r0 = 0.75, m = 2.7 | Illumination | 93.1 | 2.15 | 1.44 | 0.12 | |
SAGE | 90.9 | 1.93 | 1.30 | 0.25 | ||
Δ/r0 = 1, m = 5.0 | Illumination | 88.1 | 0.71 | 0.53 | 0.35 | |
SAGE | 84.5 | 0.51 | 0.35 | 0.13 |