Figure 4

(a) Schematic diagram of adhesion lithography process for Al2O3 pattern formation; (b,c) SEM images of the produced Al2O3 patterns, and XPS and EDAX analyses results showing that Al was not detected in region B where Al2O3 was peeled off.

(a) Schematic diagram of adhesion lithography process for Al2O3 pattern formation; (b,c) SEM images of the produced Al2O3 patterns, and XPS and EDAX analyses results showing that Al was not detected in region B where Al2O3 was peeled off.