Table 2 Component values of the equivalent circuit model parameters.
\({L}_{m}\) (nH) | \({C}_{mg}\) (pF) | \({C}_{mp}\) (pF) | \({L}_{P}\) (nH) | \({L}_{via}\) (nH) | \({C}_{pg}\) (pF) | \({C}_{ps}\) (pF) | \({C}_{o}\) (pF) | \({C}_{sg}\) (pF) | \({C}_{sg2}\) (pF) | \({L}_{s}\) (nH) | \({L}_{s2}\) (nH) | \({C}_{ms}\)(pF) | \({C}_{ms2}\)(pF) |
|---|---|---|---|---|---|---|---|---|---|---|---|---|---|
0.75 | 0.0475 | 0.27 | 0.205 | 0.1 | 0.19 | 0.15 | 0.047 | 0.6174 | 0.1933 | 0.1 | 0.05 | 4 | 0.954 |