Figure 3

(a) Brightfield TEM image of CMOS-integrated RRAM cell in 1-transistor 1-RRAM (1T1R) configuration. Zoomed-in brightfield images of the TaO_x (b) and HfO_x (d) based RRAM devices shown on the left. Energy-dispersive X-ray spectroscopy (EDS) images showing the elements Ti, Ta, Hf, O, and N for the TaO_x (c) and HfO_x (e) devices shown on the right.