Table 1 Operating conditions for plasma functionalization.
Gas | Gas flow rate | Treatment time | Pressure | Power | Pulse mode |
|---|---|---|---|---|---|
Ar (pre-activation) | 20 sccm | 45 sec | 50 mTorr | 75 W | CW |
Air | 10 sccm | 5 min | 60 mTorr | 100 W | CW |
O2 | 25 sccm | 5 min | 58–60 mTorr | 100 W | CW |
Ar (carrier) + AAc | 10 sccm | 5 min | 57–68 mTorr | 100 W | D.s (50%) |
\(Ar+ \frac{{O}_{2}}{AAc}(1:1-1:5)\) | 20 - 60 sccm | 5 min | 75 mTorr | 100 W | D.s (50%) |