Table 1 X-Ray diffraction pattern of fabricated P-Si layer.
Substrate orientation (hkl) | 2 theta (Degree) | Full width at half maximum (Degree) | Crystallite size (nm) | Interplanner spacing (nm) |
|---|---|---|---|---|
<200> | 33.101 | 0.290 | 0.282 | 0.211 |
<400> | 69.331 | 0.321 | 0.141 | 0.142 |