Figure 3
From: Room temperature wafer bonding through conversion of polysilazane into \(\hbox {SiO}_{2}\)
Bond strength \(\gamma \) of the bonded wafers via PHPS layers at room temperature.
Figure 3 | Scientific Reports
From: Room temperature wafer bonding through conversion of polysilazane into \(\hbox {SiO}_{2}\)
Bond strength \(\gamma \) of the bonded wafers via PHPS layers at room temperature.
