Figure 2

In (a) an image of the detector is shown. The detector is located between the beam nozzle and the sample. In (b) a schematic image of the detector from the top view is shown. The cathode and anode are aligned parallel to the beam and a voltage of 1300 V is applied. The detector is filled with CF₄ gas at room pressure and kept under a constant gas flow. Transmitted ions have to pass two 7.5 µm thin Kapton foil windows at the entrance and exit of the detector.