Figure 2 | Scientific Reports

Figure 2

From: Scalable and efficient grating couplers on low-index photonic platforms enabled by cryogenic deep silicon etching

Figure 2

(a) Photograph of a 20 × 20 mm2 die, where a dense matrix of membrane windows is fabricated via back-side etching of the silicon handle. The fabricated membranes contain only a few micrometers of material and are therefore transparent. (b) Optical microscope image of a completed sample, showing several grating couplers patterned atop the metal mirrors.

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