Table 1 Coefficients of thermal expansion (CTEs) and CTE differences between Ge and substrate (Δα) at room temperature.

From: Strain-dependent grain boundary properties of n-type germanium layers

Substrate

CTE [10–6 K–1]

Δα [10–6 K–1]

SiO2

0.5

–5.3

Si

3.9

–1.9

CaF2

18.9

13.1

PI

27.0

21.2