Table 1 Surface treatment steps for each device.
From: Surface modification and coherence in lithium niobate SAW resonators
Device | Treatment steps |
|---|---|
CLN | None (Control) + metalization |
Annealed | 500 \(^{\circ }\)C anneal, 8h + metalization |
BOE | 500 \(^{\circ }\)C anneal, 8h + 2 min BOE dip + metalization |
MgO | 5% MgO co-doped substrate + metalization |
Piranha | 2 \(\times\) (10 min Piranha + 30 s BOE) + metalization |
GCIB | Metalization + 3 min 10kV GCIB |
