Figure 6
SEM microstructure images of Y2O3 and Y2O3-YAM composites with different volume ratios after plasma etching under at 40:10:10 CF4:Ar:O2 gas ratio; (a) Y2O3 monolith ceramic, (b) YAM1, (c) YAM3, (d), YAM5, (e), YAM7, and (f) YAM9 composite ceramics.
