Table 1 Composition ratios of Y4Al2O9 (YAM) and Y2O3 ceramics.

From: Microstructural characterization and inductively coupled plasma-reactive ion etching resistance of Y2O3–Y4Al2O9 composite under CF4/Ar/O2 mixed gas conditions

Sample name

Y4Al2O9(YAM) (Vol%)

Y2O3 (Vol%)

Y2O3

0

100

YAM1

10

90

YAM3

30

70

YAM5

50

50

YAM7

70

30

YAM9

90

10

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