Figure 2 | Scientific Reports

Figure 2

From: Lens-free reflective topography for high-resolution wafer inspection

Figure 2

Flow chart of the image reconstruction algorithm. The network input corresponds to the \({\text{j}}\)-th measured diffractive image \(I\) and illuminated position \({{\varvec{r}}}_{{\text{j}}}=({x}_{{\text{j}}}+\delta {x}_{{\text{j}}},{y}_{{\text{j}}}+\delta {y}_{{\text{j}}})\), where \((\delta {x}_{{\text{j}}}\), \(\delta {y}_{{\text{j}}})\) represents the measurement error in the scanning position. The reconstructed complex functions \({O}_{{\text{r}}}\) and \({\psi }_{{\text{r}}}\) are considered as the two-channel learnable filter of the convolutional layer. The number of pixels in \({\psi }_{{\text{r}}} ({m}_{2}\times {m}_{2})\) is determined using FOD, whereas that in \({O}_{{\text{r}}}\) (\({m}_{1}\times {m}_{1})\) is determined using both FOD and FOI. Therefore, a new cropped object function \({O}_{{\text{c}}}\) is defined by selecting \({m}_{2}\times {m}_{2}\) pixels from the illuminated position. Using zero-padding, the pixel number can be adjusted based on the reconstruction time and FOV of the reconstructed image. The output of the network \({I}_{{\text{r}}}\), propagated to the detector plane \(s\) using the element product of \({\psi }_{{\text{r}}}\) and \({O}_{{\text{c}}}\), is compared with the \(I\). A single iteration is completed after the same process is performed for all \(N\) measured images. The optimization process of the network iterates \(i\) times until Eq. (3) is minimized.

Back to article page