Figure 1
From: On-chip flow cytometer using integrated photonics for the detection of human leukocytes
Schematic illustrations of the on-chip flow cytometer. (a) The distribution of the optical components at the interrogation point. (b) Schematic illustration of the layout of the optical detection. (c) Cross-section of the layer stack, indicating the main components of the on-chip flow cytometer: 1—in-coupling grating, 2—illumination grating, 3—collection gratings, 4—edge-coupler on quartz, W1—bottom silicon wafer, W2—middle silicon wafer, W3—top quartz wafer. The drawing is not to scale. (d) A schematic drawing of the fluidic components. Several optical interrogation points are located along the microfluidic channel. The sheath flows allowed fluidic side focusing of the sample flow and were monitored using flow meters and pressure sensors.
