Figure 1

Schematic of the funnel-shaped structures and reflectance based on structural shape. (a) The schematic of funnel-shaped silicon (Si) antireflective structure. (b) Structures with identical width and height in parabolic, cone, and funnel shapes (a = 400 nm). (c) Quintic refractive index profile and refractive index profiles of parabolic, cone, and funnel-shaped structures. (d) Simulation results of reflectance for parabolic, cone, and funnel-shaped structures.