Figure 3 | Scientific Reports

Figure 3

From: Quintic refractive index profile-based funnel-shaped silicon antireflective structures for enhanced photodetector performance

Figure 3

Fabrication process and results of funnel-shaped structures. (a) Diagram of the fabrication process for funnel-shaped structures on a Si nanograting substrate. (b) Cross-sectional scanning electron microscope (SEM) images of Si structures with different durations of KOH etching (scale bars: 500 nm). (c) Structural dimension as a function of KOH etching time. (d) Optical microscopy (OM) image of a Si substrate with fabricated funnel-shaped structures (scale bar: 1 cm). Insets are enlarged cross-sectional SEM images of the optimized funnel-shaped structures (scale bars: 200 nm). (e) Dimensions of funnel-shaped structures located at positions 1 to 9 on a Si substrate with fabricated funnel-shaped structures.

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