Table 6 Operating conditions used in EPMA.
Parameters | Value |
|---|---|
Accelerating voltage | 10.0 kV |
Probe current | 30 nA |
Mode | SPOT |
Probe diameter (nom) | 1 µm |
Dwell time | 10.00 ms |
Direction | Single |
Points | 750 \(\times\) 535 |
Interval | X: 2.00 Y:2.00 |
Parameters | Value |
|---|---|
Accelerating voltage | 10.0 kV |
Probe current | 30 nA |
Mode | SPOT |
Probe diameter (nom) | 1 µm |
Dwell time | 10.00 ms |
Direction | Single |
Points | 750 \(\times\) 535 |
Interval | X: 2.00 Y:2.00 |