Table 1 Calculated design parameters and their ranges for finite element analysis.
Description [unit] | Parameter | Value | Min | Max |
|---|---|---|---|---|
Electrode width [μm] | We | 75 | 50 | 500 |
Electrode spacing [μm] | Ws | 100 | 50 | 500 |
Upper layer thickness [μm] | \({t}_{up}\) | 25 | – | – |
Upper adhesive thickness [μm] | \({t}_{ad.up}\) | 25 | – | – |
Electrode thickness [μm] | \({t}_{e}\) | 35 | – | – |
Lower adhesive thickness [μm] | \({t}_{ad.low}\) | 5 | – | – |
Monolayer thickness [μm] | \({t}_{m}\) | 25 | – | – |
Air thickness [μm] | \({t}_{air}\) | 50 | 30 | 150 |
Object thickness [μm] | \({t}_{ob}\) | 800 | – | – |
Inner layer thickness [μm] | \({t}_{in}\) | 12.5 | 10 | 100 |
Outer layer thickness [μm] | \({t}_{out}\) | 12.5 | 10 | 100 |
Voltage [kV] | \(V\) | 10 | 1 | 10 |
Upper layer permittivity | \({\varepsilon }_{up}\) | \(2\) | – | – |
Adhesive permittivity | \({\varepsilon }_{ad}\) | \(3.6\) | – | – |
Monolayer permittivity | \({\varepsilon }_{m}\) | \(3.5\) | – | – |
Object permittivity | \({\varepsilon }_{ob}\) | \(2.3\) | – | – |
Inner layer permittivity | \({\varepsilon }_{in}\) | \(2.5\) | 1 | 10 |
Outer layer permittivity | \({\varepsilon }_{out}\) | \(4.5\) | 1 | 10 |
Electrode permittivity | \({\varepsilon }_{e}\) | \(1\) | – | – |
Air permittivity | \({\varepsilon }_{air}\) | \(1\) | – | – |
