Table 1 The parameters of the designed biosensor.

From: Folded flexure MOEMS for the detection of PSA and hepatitis DNA as biosensor for prostate cancer and viruses

Parameter

Explain

Value

\(\:{L}_{0},\:{L}_{1},\:{L}_{2},\:{L}_{3},\) and \(\:{L}_{4}\)

Length dimensions

350, 250, 50, 70, and 30 μm

\(\:{W}_{0},\:{W}_{1},\:{W}_{2},\:{W}_{3},\) and \(\:{W}_{4}\)

Width dimensions

112, 52, 24, 6, and 24 μm

\(\:{F}_{0}\) and \(\:{F}_{1}\)

Sensing finger size

15 and 5 μm

\(\:{d}_{0}\)

Substrate distance

0.34 μm

t

Thickness

0.5 μm

G

Two flexure distance

20 μm

E

Si3N4 Young’s modulus

80 GPa

n

Si3N4 Poisson’s ratio

0.24

C

Concentration ranges

0-1000 ng/ml (PSA)

0–28. 33 nM (Hepatitis DNA)

R [31]

PD responsivity

1.0081 A/W

P

Laser power

1 µW

λ

Wavelength

1550 nm

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