Table 2 The comparison of final displacement values between MEMS and MEMS spherical monitoring device.
Height | MEMS spherical monitoring device final displacement values/mm | MEMS sensor final displacement values/mm | ||
|---|---|---|---|---|
h = 300 mm | B1 | 7.1 | D1 | 7.8 |
B2 | 28.4 | D2 | 16.4 | |
B3 | 35.5 | D3 | 28.7 | |
B4 | 26.9 | D4 | 31.3 | |
h = 500 mm | B5 | 8.4 | D5 | 7.6 |
B6 | 9.8 | D6 | 7.0 | |
h = 700 mm | B7 | 6.0 | D7 | 5.4 |
B8 | 6.9 | D8 | 5.3 | |
