Table 1 Parameters, variables and values used in the proposed HJ-DD-UTFET and A-SD-HJ-DD-UTFET devices.
Parameter | Variables | Values (HJ-DD-UTFET) symmetric | Values (A-SD-HJ-DD-UTFET) asymmetric |
|---|---|---|---|
Length of source, channel and drain | LS, LCH, LD | 20 nm each | 20 nm each |
Thickness of body, drain and drain oxide | TB, TD, TDOX | 10 nm, 10 nm, 0 nm (TB = TD) | 10 nm, 6 nm, 2 nm |
Thickness of gate, SiO2, HfO2 | TG, TOX1, TOX2 | 1 nm each | 1 nm each |
Length of PG, TG, AG, spacer | LPG, LTG, LAG, LSP | 17 nm, 10 nm, 10 nm, 3 nm | 17 nm, 15 nm, 5 nm, 3 nm |
Uniform doping concentration | ND | 1 × 10 19 cm −3 | 1 × 10 19 cm −3 |
Work function of PG, TG, AG | ΦPG, ΦM1, ΦM2 | 5.93 eV, 5.1 eV, 4.9 eV | 5.93 eV, 5.1 eV, 4.9 eV |