Table 1 SEM-EDX analysis settings for the two SEM-EDS systems.

From: Determining factors affecting the accuracy of SEM-EDX data-based quantitative chemical analysis for identifying naturally occurring individual carcinogenic erionite fibers

Setting

SEM.EDS.1

SEM.EDS.2

SEM

Hitachi SU-70 Schottky field emission SEM

TESCAN CLARA SEM

EDS

Thermo scientific

Oxford

EDS detector

Si (Li) detector

Si drift detector

Coating

platinum (Pt)

Carbon (C)

Accelerating voltage

15 kV

15 kV

Acquisition time

60 s

60 s

Microanalysis system

Noran System 7 (NSS)

AZTECH

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