Table 1 Parameters used for the femtosecond laser ablation of studied parameters slots within the base glass substrate.

From: The route to microstructures with optical quality glass surfaces by fs laser ablation

High voltage of the pulse picker

(HVpp) [V]

Fluence

at 100 kHz

(J/cm2)

Fluence

at 600 kHz

(J/cm2)

1000

6.19

1.03

1100

7.27

1.21

1200

8.36

1.39

1300

9.44

1.57

1400

10.45

1.74

1500

11.40

1.90

1600

12.28

2.05

1700

13.04

2.17

1800

13.70

2.28

1900

14.21

2.37

2000

14.68

2.45

2100

15.03

2.50

2200

15.20

2.53

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