Fig. 3
(a) Frequency spectrum of the microwave superconducting for 40nm Ta CPW on silicon chip measured at \(T=\) 77 mK. (b) The magnitude and (inset) circle fit of the measured transmitted signal for \({f}_{r}=\) 3.6539 GHz at high power (VNA power \(=\) 0 dBm, corresponding to \(<{n}_{ph}> \approx\) 5.52 × 105 with \({Q}_{l}=\) 4872 and \({Q}_{c}=\) 4897 at \(T=\) 77 mK.
