Fig. 4
(a) Internal quality factor (\({Q}_{i}\)) of three CPW resonators on silicon as a function of average photon numbers \(<{n}_{ph}>\), the scatter plots are for measurement data, solid lines are fitted data based on Eq. (4) and error bars are depicted with caps (a) 40 nm Ta at \(T=\) 77 mK. (b) \({f}_{r}=\) 3.654 at three different temperatures. (c) 80 nm Ta at \(T=\) 44 mK and (d) 100 nm Ta at \(T=\) 40 mK.
