Fig. 5

(\({Q}_{i}/{Q}_{c}\)) of three CPW resonators on silicon as a function of photon number for (a) 40 nm Ta, at \(T=\) 77 mK. (b) 40 nm Ta for \({f}_{r}=\) 3.654 at three different temperatures. (c) 80 nm Ta at \(T=\) 44 mK, and (d) 100 nm Ta at \(T=\) 40 mK.