Fig. 5

Results obtained for single-sided lapping of Al2O3: (a) cumulative linear material removal (Δh), (b) surface roughness parameter (Ra), (c) waviness parameter (Wa); error bars show (±) standard deviation.

Results obtained for single-sided lapping of Al2O3: (a) cumulative linear material removal (Δh), (b) surface roughness parameter (Ra), (c) waviness parameter (Wa); error bars show (±) standard deviation.