Fig. 9
From: A 2D omnidirectional inertial switch with multiple thresholds
Top view and cross-sectional view illustrating the main steps of the SOIMUMPs process for fabricating the inertial switch43.
Fig. 9 | Scientific Reports
From: A 2D omnidirectional inertial switch with multiple thresholds
Top view and cross-sectional view illustrating the main steps of the SOIMUMPs process for fabricating the inertial switch43.
