Table 2 Geometric dimensions of the inertial switch design.
From: A 2D omnidirectional inertial switch with multiple thresholds
Component | Geometric Parameter | Value |
|---|---|---|
Device bulk | Total area of the device (length × width) Fixed thickness (h) | (2247 × 2247) µm2 25 μm |
Spring | Width (w) | 5.5 μm |
First electrode | Spring width (ws1) | 5.5 μm |
Gaps | First threshold gap from the proof mass (x1) Second threshold gap from the first switch (x2) | 3 μm 3 μm |
