Fig. 11
Simulated center displacements of the pMUT versus the thickness of the PZT layer. The thickness of PZT ranged from 0.1 μm to 10 μm, and the pMUT was driven with 1 V DC voltage.
Fig. 11 | Scientific Reports
Simulated center displacements of the pMUT versus the thickness of the PZT layer. The thickness of PZT ranged from 0.1 μm to 10 μm, and the pMUT was driven with 1 V DC voltage.
