Fig. 15

(a) Picture and (b) layout of the 725 μm pMUT array with geometric parameters. The pitch and size of the pMUT array are 1450 μm and 1.7 cm2, respectively.

(a) Picture and (b) layout of the 725 μm pMUT array with geometric parameters. The pitch and size of the pMUT array are 1450 μm and 1.7 cm2, respectively.