Table 2 Structural parameters of the proposed pMUTs23.

From: Air-coupled piezoelectric micromachined ultrasonic transducer array based on low-cost and large remnant polarization PZT thin film

Parameter

Value (µm)

Thickness of the top electrode (Al)

0.1

Thickness of the sol-gel PZT

0.1

Thickness of the sputter PZT

1.4

Thickness of the bottom electrode (Ti/Pt)

0.02/0.25

Thickness of the substrate

375

Radius of the cavity and the bottom electrode

600–725 (with a deviation of 25 μm)

Radius of the top Al electrode

\(\:\text{0.67}\times\:\text{Radius\:of\:the\:cavity}\)

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