Table 4 Comparison of the proposed pMUT array with published air-coupled pMUTs.

From: Air-coupled piezoelectric micromachined ultrasonic transducer array based on low-cost and large remnant polarization PZT thin film

 

This study

38

39

40

Acoustic pressure (Pa)

87.4

2.07

4.42

0.43

Material of actuation layer

PZT

PZT

PZT

PZT/ Polycarbonate (PC)

PMUT radius (µm)

725

625

725

6000

Array size

5 × 5

2 × 2

1 × 1

Five-spot pattern

Operating frequency (kHz)

52.2

46

40.48

21.75

Measured distance (cm)

3

33

3

20

Drive voltage (Vpp)

50

5

50

10

Transmission efficiency (Pa/V)

1.748

0.414

0.088

0.043

Transmission efficiency

per area (Pa/V/cm2)

1.299

4.6

5.353

0.038

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