Fig. 7

(left) System dynamics analysis of the data from Fig. 1a using the model from Fig. 6. A pH scale assuming Eq. 10 is shown at the top, the ramps and pulses used for each process are shown at the bottom; (right) Microscopic comparison of the bright−field surface structure and the confocal fluorescence resolved internal structure of two different CMPs before and after 2 h of SGF treatment.