Fig. 10
From: Subwavelength grating-assisted silicon nitride edge coupler with relaxed alignment tolerance
(a) Optical image of the fabricated device. (b) Optical microscope images of the fabricated SWG-assisted SiN edge coupler. Scanning electron microscope image of (c) cross-section of the SWG tri-tip and (d) SWG-assisted SiN edge coupler.
