Table 1 Structural parameters of the designed edge coupler.
From: Subwavelength grating-assisted silicon nitride edge coupler with relaxed alignment tolerance
Ltotal | L1 | L2 | L3 | Λ | wtip | wSWG | wSiN |
|---|---|---|---|---|---|---|---|
110 μm | 60 μm | 20 μm | 14 μm | 400 nm | 200 nm | 1 μm | 1 μm |
w1 | w2 | w3 | w4 | g1 | g2 | g3 | |
200 nm | 700 nm | 600 nm | 600 nm | 3 μm | 1.2 μm | 1.1 μm |
