Fig. 1

Schematic of the implemented setup with labels for the key parameters of a multi-beam multi-slice measurement. Two beams (blue and orange) are separated perpendicularly to the beam axis z. These illuminate nanostructures on two Si\(_3\)N\(_4\) membranes that are separated in z. The upstream membrane features Fresnel zone plate nanostructures in gold, while the downstream membrane holds gold nanoparticles. The beam separation can be chosen at will, as the focusing optical elements (a standard and a coded Fresnel zone plate) are not laterally fixed. When the separation is set to zero, the beams overlap and act as one single beam.