Fig. 7
Visibility and sensitivity distribution for different spectra and different grating geometries on a region of interest (ROI) of 236 \(\times\) 110 pixels. The quantiles shown span the 1 to 99 % range of the experimental data, with the colored boxes capturing the 25 to 75 % ranges, with the line in the center indicating the median value. (a) Visibility distribution from measurement is overlayed with the optimal values of the simulation. The visibility images were filtered first using a Gaussian filter with a kernel size of one pixel to reduce the influence of noise on the statistics. (b) Sensitivity calculated as the product of the \(\sqrt{I}V\). Although the visibilities are similar, the reduction in transmission from the DRIE gratings leads to overall lower sensitivity.
