Fig. 8

(a) Profile of the silicon template extracted from the SEM images for the DRIE gratings. (b) Visibility spectra for the pairs of DRIE and X-LIGA gratings. Because the DRIE gratings are shallower than the X-LIGA gratings, i.e., have less Au height for X-ray absorption, the visibility spectrum drops faster at higher energies. However, the lower mean duty cycle associated with their tapering allows for higher visibility at lower energies.