Fig. 8 | Scientific Reports

Fig. 8

From: Quantifying grating defects in X-ray Talbot-Lau interferometry through a comparative study of two fabrication techniques

Fig. 8The alt text for this image may have been generated using AI.

(a) Profile of the silicon template extracted from the SEM images for the DRIE gratings. (b) Visibility spectra for the pairs of DRIE and X-LIGA gratings. Because the DRIE gratings are shallower than the X-LIGA gratings, i.e., have less Au height for X-ray absorption, the visibility spectrum drops faster at higher energies. However, the lower mean duty cycle associated with their tapering allows for higher visibility at lower energies.

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