Abstract
The steep slope of the asymmetric Fano resonance offers potential for enhancing signal readout in compact photonic sensors across gas and liquid environments. However, achieving and controlling Fano resonance shapes on ultra-compact, fabrication-constrained platforms, particularly across variable claddings, remains challenging. We demonstrate a CMOS-compatible Si3N4 photonic platform based on a photonic crystal nanobeam (PhCN) side-coupled to a racetrack microring resonator (MRR), enabling engineered Fano resonances through passive geometric control. By varying the PhCN length and coupling gap, we systematically modulate the interference conditions that define resonance asymmetry and slope. Numerical and experimental results under both air and aqueous claddings show that the cladding-dependent modal transition, from leaky (air) to guided (liquid) backgrounds, enables robust, geometry-driven Fano behavior. A temporal coupled-mode theory model supports the results. The fabricated devices show steep asymmetric lineshapes, with \({Q}_{t}\)>5\(\cdot\)103, ER > 14dB (up to 20 dB maximum across all devices), \(q\) > 0.4, and slope responsivity >5 nm–1(or 40–50 dB/nm), all within a compact footprint of ~40 × 34 µm2. The performance is comparable to similar MRR-based Fano implementations. This work provides a reproducible strategy for slope-optimized, passive Fano devices suitable for intensity-based refractive index sensing in lab-on-chip systems operating under variable cladding conditions without requiring ultra-high \(Q\) or extreme ER. Thus, it serves as a design framework for future implementations.
Data availability
Data underlying the results presented in this paper are not publicly available at this time but may be obtained from the authors upon reasonable request.
References
Limonov, M. F., Rybin, M. V., Poddubny, A. N. & Kivshar, Y. S. Fano resonances in photonics. Nat. Photonics. 11, 543–554 (2017).
Dong, G., Wang, Y. & Zhang, X. High-contrast and low-power all-optical switch using Fano resonance based on a silicon nanobeam cavity. Opt. Lett. 43, 5977–5980 (2018).
Dong, G. et al. Experimental demonstration of a nanobeam Fano laser. Opt. Express. 32, 5242–5251 (2024).
Yang, K. Y. et al. Inverse-designed non-reciprocal pulse router for chip-based lidar. Nat. Photonics. 14, 369–374 (2020).
Limonov, M. F. Fano resonance for applications. Adv. Opt. Photonics. 13, 703–771 (2021).
Ruege, A. C. & Reano, R. M. Multimode waveguide-cavity sensor based on fringe visibility detection. Opt. Express. 17, 4295–4305 (2009).
Chao, C. Y. & Guo, L. J. Biochemical sensors based on polymer microrings with Sharp asymmetrical resonance. Appl. Phys. Lett. 83, 1527–1529 (2003).
Chao, C. Y. & Guo, L. J. Design and optimization of microring resonators in biochemical sensing applications. J. Light Technol. 24, 1395–1402 (2006).
Mehta, K. K., Orcutt, J. S. & Ram, R. J. Fano line shapes in transmission spectra of silicon photonic crystal resonators. Appl. Phys. Lett. 102, 081109 (2013).
Yu, P. et al. Fano resonances in ultracompact waveguide Fabry-Perot resonator side-coupled lossy nanobeam cavities. Appl. Phys. Lett. 103, 091104 (2013).
Lin, T., Chau, F. S., Deng, J. & Zhou, G. Dynamic control of the asymmetric Fano resonance in side-coupled Fabry–Pérot and photonic crystal nanobeam cavities. Appl. Phys. Lett. 107, 223105 (2015).
Meng, Z. M., Liang, A. & Li, Z. Y. Fano resonances in photonic crystal nanobeams side-coupled with nanobeam cavities. J. Appl. Phys. 121, 193102 (2017).
Meng, Z. M. & Li, Z. Y. Control of Fano resonances in photonic crystal nanobeams side-coupled with nanobeam cavities and their applications to refractive index sensing. J. Phys. Appl. Phys. 51, 095106 (2018).
Burr, J. R., Wood, M. G. & Reano, R. M. Experimental verification of degenerate band edge dispersion in silicon photonic integrated circuits. IEEE Photonics J. 8, 1–10 (2016).
Cheng, Z., Dong, J. & Zhang, X. Ultracompact optical switch using a single semisymmetric Fano nanobeam cavity. Opt. Lett. 45, 2363–2366 (2020).
Sun, F. et al. Scalable high Q-factor Fano resonance from air-mode photonic crystal nanobeam cavity. Nanophotonics 12, 3135–3148 (2023).
Zhou, X. et al. On-Chip biological and chemical sensing with reversed Fano lineshape enabled by embedded microring resonators. IEEE J. Sel. Top. Quantum Electron. 20, 35–44 (2014).
Xiao, H. et al. Tunable Fano resonance in mutually coupled micro-ring resonators. Appl. Phys. Lett. 111, 091901 (2017).
Wang, G. et al. Fano-resonance-based ultra-high-resolution ratio-metric wavelength monitor on silicon. Opt. Lett. 41, 544–547 (2016).
Qiu, C. et al. Asymmetric Fano resonance in eye-like microring system. Appl. Phys. Lett. 101, 021110 (2012).
Zhou, L. & Poon, A. W. Fano resonance-based electrically reconfigurable add-drop filters in silicon microring resonator-coupled Mach-Zehnder interferometers. Opt. Lett. 32, 781–783 (2007).
Li, X. et al. Bandwidth-tunable optical filter based on microring resonator and MZI with Fano resonance. J. Opt. 49, 427–432 (2020).
Troia, B. et al. Silicon ring resonator-coupled Mach–Zehnder interferometers for the Fano resonance in the mid-IR. Appl. Opt. 56, 8769–8776 (2017).
Cheng, W. et al. Achieving Fano resonance with an ultra-high slope rate by silicon nitride CROW embedded in a Mach-Zehnder interferometer. Opt. Express. 30, 46147–46156 (2022).
Zhang, W., Li, W. & Yao, J. Optically tunable Fano resonance in a grating-based Fabry–Perot cavity-coupled microring resonator on a silicon chip. Opt. Lett. 41, 2474–2477 (2016).
Zhang, Z. et al. Conversion between EIT and Fano spectra in a microring-Bragg grating coupled-resonator system. Appl. Phys. Lett. 111, 081105 (2017).
Carlo, M. D., Leonardis, F. D., Dell’Olio, F., Ding, Y. & Passaro, V. M. N. Dissipative coupling in a Bragg-grating-coupled single resonator with Fano resonance for anti-PT-symmetric gyroscopes. Opt. Express. 32, 5932–5942 (2024).
Peng, F., Wang, Z., Yuan, G., Guan, L. & Peng, Z. High-Sensitivity refractive index sensing based on Fano resonances in a photonic crystal Cavity-Coupled microring resonator. IEEE Photonics J. 10, 1–8 (2018).
Gu, L. et al. A compact structure for realizing Lorentzian, Fano, and electromagnetically induced transparency resonance lineshapes in a microring resonator. Nanophotonics 8, 841–848 (2019).
Gu, L. et al. Fano resonance lineshapes in a waveguide-microring structure enabled by an air-hole. APL Photonics. 5, 016108 (2020).
Zhang, C. et al. Photonic thermometer with a sub-millikelvin resolution and broad temperature range by waveguide-microring Fano resonance. Opt. Express. 28, 12599–12608 (2020).
Fang, L. et al. Controlling resonance lineshapes of a Side-Coupled Waveguide-Microring resonator. J. Light Technol. 38, 4429–4434 (2020).
Mendoza-Castro, J. H. et al. Enhanced Fano resonances in a silicon nitride photonic crystal nanobeam-assisted micro ring resonator for dual Telecom band operation. Opt. Express. 32, 13197–13207 (2024).
Yi, H., Citrin, D. S. & Zhou, Z. Highly sensitive silicon microring sensor with Sharp asymmetrical resonance. Opt. Express. 18, 2967–2972 (2010).
Hong, Q. et al. Silicon-Based On-Chip tunable High-Q-Factor and Low-Power Fano resonators with graphene nanoheaters. Nanomaterials 13, 1636 (2023).
Li, H. et al. Fano resonance Thermo-Optic modulator based on double T-Bus Waveguides-Coupled Micro-Ring resonator. Photonics 11, 255 (2024).
Tu, Z., Gao, D., Zhang, M. & Zhang, D. High-sensitivity complex refractive index sensing based on Fano resonance in the subwavelength grating waveguide micro-ring resonator. Opt. Express. 25, 20911–20922 (2017).
Ding, D. et al. Fano resonances in a multimode waveguide coupled to a high-Q silicon nitride ring resonator. Opt. Express. 22, 6778–6790 (2014).
Yuan, T. et al. Frequency-Space selective Fano resonance based on a Micro-Ring resonator on lithium niobate on insulator. Laser Photonics Rev. 18, 2400457 (2024).
Wang, J., Lin, J., Jin, P., Liu, S. & Zhou, K. Fano resonance in a microring resonator with a micro-reflective unit. Opt. Express. 31, 31587–31596 (2023).
Fan, S., Suh, W. & Joannopoulos, J. D. Temporal coupled-mode theory for the Fano resonance in optical resonators. JOSA A. 20, 569–572 (2003).
Heuck, M., Kristensen, P. T., Elesin, Y. & Mørk, J. Improved switching using Fano resonances in photonic crystal structures. Opt. Lett. 38, 2466–2468 (2013).
Yu, Y. et al. Fano resonance control in a photonic crystal structure and its application to ultrafast switching. Appl. Phys. Lett. 105, 061117 (2014).
Bekele, D., Yu, Y., Yvind, K. & Mork, J. In-Plane photonic crystal devices using Fano resonances. Laser Photonics Rev. 13, 1900054 (2019).
Yu, Y., Zali, A. R. & Mørk, J. Theory of linewidth narrowing in Fano lasers. Phys. Rev. Res. 4, 043194 (2022).
Christopoulos, T., Tsilipakos, O., Sinatkas, G. & Kriezis, E. E. On the calculation of the quality factor in contemporary photonic resonant structures. Opt. Express. 27, 14505–14522 (2019).
Galli, M. et al. Light scattering and Fano resonances in high-Q photonic crystal nanocavities. Appl. Phys. Lett. 94, 071101 (2009).
Maksymov, I. S. & Miroshnichenko, A. E. Active control over nanofocusing with Nanorod plasmonic antennas. Opt. Express. 19, 5888–5894 (2011).
Osterkryger, A. D. et al. Spectral symmetry of Fano resonances in a waveguide coupled to a microcavity. Opt. Lett. 41, 2065 (2016).
Pinto, D. et al. Wavelength modulated diode probe laser for an interferometric cavity-assisted photothermal spectroscopy gas sensor, Sens. Actuators B Chem. 377, 133061 (2023).
Joannopoulos, J. D. Photonic Crystals: Molding the Flow of Light 2nd edn (Princeton University Press, 2008).
Johnson, S. G. & Joannopoulos, J. D. Block-iterative frequency-domain methods for maxwell’s equations in a Planewave basis. Opt. Express. 8, 173–190 (2001).
Oskooi, A. F. et al. Meep: A flexible free-software package for electromagnetic simulations by the FDTD method. Comput. Phys. Commun. 181, 687–702 (2010).
Iadanza, S. et al. High-Q asymmetrically cladded silicon nitride 1D photonic crystals cavities and hybrid external cavity lasers for sensing in air and liquids. Nanophotonics 11, 4183–4196 (2022).
Castelló-Pedrero, L., Gómez-Gómez, M. I., García-Rupérez, J., Griol, A. & Martínez, A. Performance improvement of a silicon nitride ring resonator biosensor operated in the TM mode at 1310 nm, biomed. Opt. Express. 12, 7244–7260 (2021).
Cheben, P., Halir, R., Schmid, J. H., Atwater, H. A. & Smith, D. R. Subwavelength Integr. Photonics Nat. 560, 565–572 (2018).
Bogaerts, W. et al. Silicon microring resonators. Laser Photonics Rev. 6, 47–73 (2012).
Cai, L., Li, S., Xiang, F., Liu, J. & Liu, Q. Fano resonance in whispering gallery mode microcavities and its sensing applications. Opt. Laser Technol. 167, 109679 (2023).
Liu, X., Yu, Y. & Zhang, X. Tunable Fano resonance with a high slope rate in a microring-resonator-coupled Mach–Zehnder interferometer. Opt. Lett. 44, 251–254 (2019).
Xiong, Z. et al. Million-Q dual-polarization micro-Fabry–Pérot resonators in silicon nitride photonic integrated circuits. Opt. Laser Technol. 192, 113854 (2025).
Acknowledgements
This work has received support from CINECA award under the ISCRA initiative, for the availability of high-performance computing resources and support (projects ASTREA & METAFORE). The authors acknowledge TU Wien Bibliothek for financial support through its Open Access Funding Programme. In memory of Dr. Marco Grande, whose dedication, guidance, and legacy continue to inspire this work.
Funding
This research was funded by the European Union’s Horizon 2020 research and innovation program under the Marie Skłodowska-Curie, agreement No 860808 (OPTAPHI), the Science Foundation Ireland through IPIC, 12/RC/2276_P2, and received also support from the Horizon Europe RIA project MULTILAB (101135435).
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Mendoza-Castro, J., Vorobev, A.S., Iadanza, S. et al. Engineered fano resonances in a compact Si3N4 photonic crystal nanobeam-microring platform for multi-cladding environments. Sci Rep (2026). https://doi.org/10.1038/s41598-026-35490-w
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DOI: https://doi.org/10.1038/s41598-026-35490-w