Fig. 2: Characteristics of the N-doped graphene on Cu interconnects.
From: Copper-graphene heterostructure for back-end-of-line compatible high-performance interconnects
a HRTEM image, b EELS mapping images, and c XPS spectra of N-doped graphene synthesized on the Cu interconnect using pyridine by APCVD at 400 °C. d G and 2D peak position distributions of undoped and N-doped graphene estimated from Raman mapping images of Supplementary Fig. 8. Scale bars, 5 nm in a and b.
