Fig. 4: Ferroelectricity of PLD-grown HZO on Si.

Dependency of (a) P–V (at 10 kHz) curves (b) magnitudes of |Vc|, |Pr| and curve-asymmetricity on the thickness of HZO (4 nm, 7 nm, and 12 nm) (c) PFM hysteresis loop averaged from 25 measurements (d) Histograms of PFM phase, before and after poling, over the same area (e) PFM of HZO thin films after poling with applied tip voltages of ±5 V.