Abstract
High-density displays are required for the development of virtual and augmented reality devices. However, increasing the pixel resolution can lead to higher electrical pixel crosstalk, primarily due to a shared hole transport layer. Here we show that a silicone-integrated small-molecule hole transport layer can be patterned at the wafer scale with microlithography to mitigate electrical pixel crosstalk. This provides high-density pixelation and improved performance of the hole transport layer itself. With this approach, we create high-fidelity micro-pattern arrays with a resolution of up to 10,062 pixels per inch on a six-inch wafer. The silicone-integrated small-molecule hole transport layer can effectively modulate charge balance within the emission layers, improving the luminance characteristics of organic light-emitting diodes. We also show that organic light-emitting diodes integrated with micro-patterned silicone-integrated small-molecule hole transport layers have a reduced electrical pixel crosstalk compared with organic light-emitting diodes with a typical hole transport layer.
This is a preview of subscription content, access via your institution
Access options
Access Nature and 54 other Nature Portfolio journals
Get Nature+, our best-value online-access subscription
$32.99 / 30 days
cancel any time
Subscribe to this journal
Receive 12 digital issues and online access to articles
$119.00 per year
only $9.92 per issue
Buy this article
- Purchase on SpringerLink
- Instant access to the full article PDF.
USD 39.95
Prices may be subject to local taxes which are calculated during checkout




Similar content being viewed by others
Data availability
The data that support the findings of this study are available from the corresponding authors upon reasonable request.
References
Joo, W.-J. & Brongersma, M. L. Creating the ultimate virtual reality display. Science 377, 1376–1378 (2022).
Zhan, T., Yin, K., Xiong, J., He, Z. & Wu, S. T. Augmented reality and virtual reality displays: perspectives and challenges. iScience 23, 101397 (2020).
Xiong, J. H. et al. Augmented reality and virtual reality displays: emerging technologies and future perspectives. Light Sci. Appl. 10, 216 (2021).
Ha, J. et al. Advanced VR and AR displays: improving the user experience. J. Soc. Inf. Disp. 39, 15–19 (2023).
Kang, C.-M. & Lee, H. Recent progress of organic light-emitting diode microdisplays for augmented reality/virtual reality applications. J. Inf. Disp. 23, 19–32 (2022).
Diethelm, M. et al. Quantitative analysis of pixel crosstalk in AMOLED displays. J. Inf. Disp. 19, 61–69 (2018).
Kang, H. et al. Investigating the electrical crosstalk effect between pixels in high‑resolution organic light‑emitting diode microdisplays. Sci. Rep. 13, 14070 (2023).
Engelhart, J. et al. Hole-transport materials—key enablers for future OLED display evolution. SID Symp. Dig. Tech. Pap. 53, 877–880 (2022).
Braga, D. et al. Modeling electrical and optical cross-talk between adjacent pixels in organic light-emitting diode displays. SID Symp. Dig. Tech. Pap. 50, 31–34 (2019).
Kaçar, R., Serin, R. B., Uçar, E. & Ülkü, A. Removing crosstalk effect for high efficient polymer light emitting diode display. Solid State Electron. 192, 108253 (2022).
Lee, J.-M. et al. Analysis and simulation of reddish overshoot in active matrix organic light-emitting diode display with varying p-doped hole transport layer concentrations. Org. Electron. 99, 106328 (2021).
Swayamprabha, S. S. et al. Hole-transporting materials for organic light-emitting diodes: an overview. J. Mater. Chem. C 7, 7144–7158 (2019).
Cha, S. & Kim, C. Transfer-printing phosphorescent OLEDs: progress towards microdisplay applications. Org. Electron. 122, 106891 (2023).
Jo, P. S., Vailionis, A., Park, Y. M. & Salleo, A. Scalable fabrication of strongly textured organic semiconductor micropatterns by capillary force lithography. Adv. Mater. 24, 3269–3274 (2012).
Bae, I. et al. Tailored single crystals of triisopropylsilylethynyl pentacene by selective contact evaporation printing. Adv. Mater. 23, 3398–3402 (2011).
Skhunov, M. et al. Pixelated full-colour small molecule semiconductor devices towards artificial retinas. J. Mater. Chem. C 9, 5858–5867 (2021).
Bail, R., Hong, J. Y. & Chin, B. D. Inkjet printing of blue phosphorescent light-emitting layer based on bis(3,5-di(9H-carbazol-9-yl))diphenylsilane. RSC Adv. 8, 11191–11197 (2018).
Zhou, X. et al. Dewetting-assisted patterning of organic semiconductors for micro-OLED arrays with a pixel size of 1 μm. Small Methods 6, 2101509 (2022).
Zhu, J. et al. Micro organic light-emitting diodes fabricated through area-selective growth. Mater. Chem. Front. 1, 2606–2612 (2017).
Jiang, Y., Tam, B. S. T., Dong, S.-C. & Tang, C. W. 2‐inch, 2,000‐ppi silicon nitride mask for patterning ultra‐high‐resolution OLED displays. SID Symp. Dig. Tech. Pap. 51, 909–912 (2020).
Kajiyama, Y., Joseph, K., Kajiyama, K., Kudo, S. & Aziz, H. Small feature sizes and high aperture ratio organic light-emitting diodes by using laser-patterned polyimide shadow masks. Appl. Phys. Lett. 104, 053303 (2014).
Jung, J. H. et al. Enhancement of luminance efficiency of 3,000 ppi OLED micro-display using RGB direct patterning. SID Symp. Dig. Tech. Pap. 54, 217–220 (2023).
Yamane, Y. et al. 3207-ppi, 1.50-in. OLED microdisplay with all pixels formed through RGB side-by-side patterning by photolithography. SID Symp. Dig. Tech. Pap. 54, 1334–1337 (2023).
Malinowski, P. E. et al. Photolithography as enabler of AMOLED displays beyond 1,000 ppi. SID Symp. Dig. Tech. Pap. 48, 623–626 (2017).
Malinowski, P. E. et al. Multicolor 1,250 ppi OLED arrays patterened by photolithography. SID Symp. Dig. Tech. Pap. 47, 1009–1012 (2016).
Joo, W.-J. et al. Metasurface-driven OLED displays beyond 10,000 pixels per inch. Science 370, 459–463 (2020).
Kim, C. et al. Fine metal mask material and manufacturing process for high-resolution active-matrix organic light-emitting diode displays. J. Soc. Inf. Disp. 28, 668–679 (2020).
Kweon, H. et al. Silicone engineered anisotropic lithography for ultrahigh-density OLEDs. Nat. Commun. 13, 6775 (2022).
Murawski, C., Fuchs, C., Hofmann, S., Leo, K. & Gather, M. C. Alternative p-doped hole transport material for low operating voltage and high efficiency organic light-emitting diodes. Appl. Phys. Lett. 105, 113303 (2014).
Zhou, X. et al. Enhanced hole injection into amorphous hole-transport layers of organic light-emitting diodes using controlled p-type doping. Adv. Funct. Mater. 11, 310–314 (2001).
Zhang, X. et al. Highly-efficient low-voltage organic light-emitting diode by controlling hole transporting with doped dual hole-transport layer and the impedance spectroscopy analysis. Synth. Met. 205, 134–138 (2015).
Yadav, R. A. K., Dubey, D. K., Chen, S.-Z., Liang, T.-W. & Jou, J.-H. Role of molecular orbital energy levels in OLED performance. Sci. Rep. 10, 9915 (2020).
Dou, J.-H. et al. Organic semiconducting alloys with tunable energy levels. J. Am. Chem. Soc. 141, 6561–6568 (2019).
Aizawa, N. et al. Solution-processed multilayer small-molecule light-emitting devices with high-efficiency white-light emission. Nat. Commun. 5, 5756 (2014).
Park, S., Kilgallon, L. J., Yang, Z., Ryu, D. Y. & Ryu, C. Y. Molecular origin of the induction period in photoinitiated cationic polymerization of epoxies and oxetanes. Macromolecules 52, 1158–1165 (2019).
Park, H. W. et al. Universal route to impart orthogonality to polymer semiconductors for sub-micrometer tandem electronics. Adv. Mater. 31, 1901400 (2019).
Yang, J. et al. Nondestructive photopatterning of heavy‐metal‐free quantum dots. Adv. Mater. 34, 2205504 (2022).
Mehonic, A. et al. Structural changes and conductance thresholds in metal-free intrinsic SiOx resistive random access memory. J. Appl. Phys. 117, 124505 (2015).
Bashouti, M. Y., Sardashti, K., Ristein, J. & Christiansen, S. Kinetic study of H-terminated silicon nanowires oxidation in very fast stages. Nanoscale Res. Lett. 8, 41 (2013).
Louis, B., Caubergh, S., Larsson, P.-O., Tian, Y. & Scheblykin, I. G. Light and oxygen induce chain scission of conjugated polymers in solution. Phys. Chem. Chem. Phys. 20, 1829–1837 (2018).
Kang, J.-W. et al. Low roll-off of efficiency at high current density in phosphorescent organic light emitting diodes. Appl. Phys. Lett. 90, 223508 (2007).
Cha, S. W., Joo, S.-H., Jeong, M.-H. & Jin, H.-I. Balancing charge carrier mobility by constructing chemical structures to contain both hole- and electron-transporting moieties in electroluminescent organic compounds. Synth. Met. 150, 309–316 (2005).
Liao, C.-H., Lee, M.-T., Tsai, C.-H. & Chen, C. H. Highly efficient blue organic light-emitting devices incorporating a composite hole transport layer. Appl. Phys. Lett. 86, 203507 (2005).
Kim, J. et al. Interpenetrating polymer semiconductor nanonetwork channel for ultrasensitive, selective, and fast recovered chemodetection. ACS Appl. Mater. Interfaces 12, 55107–55115 (2020).
Chua, L.-L. et al. General observation of n-type field-effect behaviour in organic semiconductors. Nature 434, 194–199 (2005).
Brunner, K. et al. Carbazole compounds as host materials for triplet emitters in organic light-emitting diodes: tuning the HOMO level without influencing the triplet energy in small molecules. J. Am. Chem. Soc. 126, 6035–6042 (2004).
Köhnen, A. et al. The simple way to solution‐processed multilayer OLEDs—layered block‐copolymer networks by living cationic polymerization. Adv. Mater. 21, 879–884 (2009).
Tsai, K.-W., Hung, M.-K., Mao, Y.-H. & Chen, S.-A. Solution‐processed thermally activated delayed fluorescent OLED with high EQE as 31% using high triplet energy crosslinkable hole transport materials. Adv. Funct. Mater. 29, 1901025 (2019).
Acknowledgements
D.H.K. acknowledges support from the Basic Science Research Program (2020R1A2C3014237 and RS-2024-00405818) and the Pioneer Research Center Program (2022M3C1A3081211) of the National Research Foundation of Korea (NRF) funded by the Ministry of Science and ICT, Korea and the Technology Innovation Program (RS-2024-00441743) funded by the Ministry of Trade, Industry & Energy (MOTIE, Korea). M.S.K. acknowledges support from the Basic Science Research Program (2021R1A2C2008332) and the Nano & Material Technology Development Program (RS-2024-00445116) of the NRF funded by the Ministry of Science and ICT, Korea.
Author information
Authors and Affiliations
Contributions
M.S.K., J.H.C. and D.H.K. supervised this project. H.K., B.H. and D.H.K. conceived the concept. H.K., S.K. and B.H. designed and carried out the experiments. H.K., B.H., So.L., S.H.R., J.H. and D.H.K. analysed the molecular structure and etching behaviour of SI-HTL. H.K. and B.H. fabricated the high-resolution patterns of SI-HTL. S.K., Se.L., M.K., S.H.R., M.S.K. and J.H.C. evaluated and interpreted the optoelectronic characteristics of SI-HTL and OLEDs. H.K., S.K. and H.O. fabricated and evaluated the pixel crosstalk of patterned SI-HTL-based OLEDs. All authors discussed the results and commented on the paper. H.K., S.K., B.H., M.S.K., J.H.C. and D.H.K. co-wrote the paper.
Corresponding authors
Ethics declarations
Competing interests
H.K., S.K., B.H., Se.L., M.S.K., J.H.C. and D.H.K. declare their status as inventors on the granted Korean patent (KR 10-2537611) and have filed the patent application (PCT/KR2023/009730). Additionally, H.K., B.H. and D.H.K. declare their status as inventors on the granted Korean patent (KR 10-2547153) and have filed the patent application (PCT/KR2023/002902). The other authors declare no competing interests.
Peer review
Peer review information
Nature Electronics thanks Ching-Fuh Lin, Alper Ulku and the other, anonymous, reviewer(s) for their contribution to the peer review of this work.
Additional information
Publisher’s note Springer Nature remains neutral with regard to jurisdictional claims in published maps and institutional affiliations.
Supplementary information
Supplementary Information (download PDF )
Supplementary Notes 1–3, Figs. 1–30, Tables 1–3 and references.
Supplementary Video 1 (download MP4 )
Electrical pixel crosstalk phenomenon as a function of SI-HTL pixelation.
Rights and permissions
Springer Nature or its licensor (e.g. a society or other partner) holds exclusive rights to this article under a publishing agreement with the author(s) or other rightsholder(s); author self-archiving of the accepted manuscript version of this article is solely governed by the terms of such publishing agreement and applicable law.
About this article
Cite this article
Kweon, H., Kim, S., Ha, B. et al. Microlithography of hole transport layers for high-resolution organic light-emitting diodes with reduced electrical crosstalk. Nat Electron 8, 66–74 (2025). https://doi.org/10.1038/s41928-024-01327-5
Received:
Accepted:
Published:
Version of record:
Issue date:
DOI: https://doi.org/10.1038/s41928-024-01327-5
This article is cited by
-
Advancing perovskite nanocrystals for high-resolution LED displays
Communications Materials (2025)
-
Photolithographic fabrication of high-resolution Micro-QLEDs towards color-conversion microdisplay
Light: Science & Applications (2025)
-
Crosstalk-free high-definition organic microdisplays
Nature Electronics (2025)


