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Microlithography of hole transport layers for high-resolution organic light-emitting diodes with reduced electrical crosstalk

Abstract

High-density displays are required for the development of virtual and augmented reality devices. However, increasing the pixel resolution can lead to higher electrical pixel crosstalk, primarily due to a shared hole transport layer. Here we show that a silicone-integrated small-molecule hole transport layer can be patterned at the wafer scale with microlithography to mitigate electrical pixel crosstalk. This provides high-density pixelation and improved performance of the hole transport layer itself. With this approach, we create high-fidelity micro-pattern arrays with a resolution of up to 10,062 pixels per inch on a six-inch wafer. The silicone-integrated small-molecule hole transport layer can effectively modulate charge balance within the emission layers, improving the luminance characteristics of organic light-emitting diodes. We also show that organic light-emitting diodes integrated with micro-patterned silicone-integrated small-molecule hole transport layers have a reduced electrical pixel crosstalk compared with organic light-emitting diodes with a typical hole transport layer.

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Fig. 1: Molecular concept and ultrahigh-density pixelation of SI-HTL.
Fig. 2: Analysis of molecular structure and etch inhibitor of SI-HTL.
Fig. 3: EL characteristics of OLEDs integrated with SI-HTL.
Fig. 4: Evaluation of electrical pixel crosstalk in OLEDs with micro-patterned SI-HTL.

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Data availability

The data that support the findings of this study are available from the corresponding authors upon reasonable request.

References

  1. Joo, W.-J. & Brongersma, M. L. Creating the ultimate virtual reality display. Science 377, 1376–1378 (2022).

    Article  MATH  Google Scholar 

  2. Zhan, T., Yin, K., Xiong, J., He, Z. & Wu, S. T. Augmented reality and virtual reality displays: perspectives and challenges. iScience 23, 101397 (2020).

    Article  Google Scholar 

  3. Xiong, J. H. et al. Augmented reality and virtual reality displays: emerging technologies and future perspectives. Light Sci. Appl. 10, 216 (2021).

    Article  MATH  Google Scholar 

  4. Ha, J. et al. Advanced VR and AR displays: improving the user experience. J. Soc. Inf. Disp. 39, 15–19 (2023).

    MATH  Google Scholar 

  5. Kang, C.-M. & Lee, H. Recent progress of organic light-emitting diode microdisplays for augmented reality/virtual reality applications. J. Inf. Disp. 23, 19–32 (2022).

    Article  MATH  Google Scholar 

  6. Diethelm, M. et al. Quantitative analysis of pixel crosstalk in AMOLED displays. J. Inf. Disp. 19, 61–69 (2018).

    Article  MATH  Google Scholar 

  7. Kang, H. et al. Investigating the electrical crosstalk effect between pixels in high‑resolution organic light‑emitting diode microdisplays. Sci. Rep. 13, 14070 (2023).

    Article  Google Scholar 

  8. Engelhart, J. et al. Hole-transport materials—key enablers for future OLED display evolution. SID Symp. Dig. Tech. Pap. 53, 877–880 (2022).

    Article  MATH  Google Scholar 

  9. Braga, D. et al. Modeling electrical and optical cross-talk between adjacent pixels in organic light-emitting diode displays. SID Symp. Dig. Tech. Pap. 50, 31–34 (2019).

    Article  MATH  Google Scholar 

  10. Kaçar, R., Serin, R. B., Uçar, E. & Ülkü, A. Removing crosstalk effect for high efficient polymer light emitting diode display. Solid State Electron. 192, 108253 (2022).

    Article  Google Scholar 

  11. Lee, J.-M. et al. Analysis and simulation of reddish overshoot in active matrix organic light-emitting diode display with varying p-doped hole transport layer concentrations. Org. Electron. 99, 106328 (2021).

    Article  MATH  Google Scholar 

  12. Swayamprabha, S. S. et al. Hole-transporting materials for organic light-emitting diodes: an overview. J. Mater. Chem. C 7, 7144–7158 (2019).

    Article  MATH  Google Scholar 

  13. Cha, S. & Kim, C. Transfer-printing phosphorescent OLEDs: progress towards microdisplay applications. Org. Electron. 122, 106891 (2023).

    Article  Google Scholar 

  14. Jo, P. S., Vailionis, A., Park, Y. M. & Salleo, A. Scalable fabrication of strongly textured organic semiconductor micropatterns by capillary force lithography. Adv. Mater. 24, 3269–3274 (2012).

    Article  Google Scholar 

  15. Bae, I. et al. Tailored single crystals of triisopropylsilylethynyl pentacene by selective contact evaporation printing. Adv. Mater. 23, 3398–3402 (2011).

    Article  MATH  Google Scholar 

  16. Skhunov, M. et al. Pixelated full-colour small molecule semiconductor devices towards artificial retinas. J. Mater. Chem. C 9, 5858–5867 (2021).

    Article  Google Scholar 

  17. Bail, R., Hong, J. Y. & Chin, B. D. Inkjet printing of blue phosphorescent light-emitting layer based on bis(3,5-di(9H-carbazol-9-yl))diphenylsilane. RSC Adv. 8, 11191–11197 (2018).

    Article  Google Scholar 

  18. Zhou, X. et al. Dewetting-assisted patterning of organic semiconductors for micro-OLED arrays with a pixel size of 1 μm. Small Methods 6, 2101509 (2022).

    Article  Google Scholar 

  19. Zhu, J. et al. Micro organic light-emitting diodes fabricated through area-selective growth. Mater. Chem. Front. 1, 2606–2612 (2017).

    Article  Google Scholar 

  20. Jiang, Y., Tam, B. S. T., Dong, S.-C. & Tang, C. W. 2‐inch, 2,000‐ppi silicon nitride mask for patterning ultra‐high‐resolution OLED displays. SID Symp. Dig. Tech. Pap. 51, 909–912 (2020).

    Article  Google Scholar 

  21. Kajiyama, Y., Joseph, K., Kajiyama, K., Kudo, S. & Aziz, H. Small feature sizes and high aperture ratio organic light-emitting diodes by using laser-patterned polyimide shadow masks. Appl. Phys. Lett. 104, 053303 (2014).

    Article  MATH  Google Scholar 

  22. Jung, J. H. et al. Enhancement of luminance efficiency of 3,000 ppi OLED micro-display using RGB direct patterning. SID Symp. Dig. Tech. Pap. 54, 217–220 (2023).

    Article  MATH  Google Scholar 

  23. Yamane, Y. et al. 3207-ppi, 1.50-in. OLED microdisplay with all pixels formed through RGB side-by-side patterning by photolithography. SID Symp. Dig. Tech. Pap. 54, 1334–1337 (2023).

    Article  Google Scholar 

  24. Malinowski, P. E. et al. Photolithography as enabler of AMOLED displays beyond 1,000 ppi. SID Symp. Dig. Tech. Pap. 48, 623–626 (2017).

    Article  MATH  Google Scholar 

  25. Malinowski, P. E. et al. Multicolor 1,250 ppi OLED arrays patterened by photolithography. SID Symp. Dig. Tech. Pap. 47, 1009–1012 (2016).

    Article  Google Scholar 

  26. Joo, W.-J. et al. Metasurface-driven OLED displays beyond 10,000 pixels per inch. Science 370, 459–463 (2020).

    Article  Google Scholar 

  27. Kim, C. et al. Fine metal mask material and manufacturing process for high-resolution active-matrix organic light-emitting diode displays. J. Soc. Inf. Disp. 28, 668–679 (2020).

    Article  MATH  Google Scholar 

  28. Kweon, H. et al. Silicone engineered anisotropic lithography for ultrahigh-density OLEDs. Nat. Commun. 13, 6775 (2022).

    Article  MATH  Google Scholar 

  29. Murawski, C., Fuchs, C., Hofmann, S., Leo, K. & Gather, M. C. Alternative p-doped hole transport material for low operating voltage and high efficiency organic light-emitting diodes. Appl. Phys. Lett. 105, 113303 (2014).

    Article  Google Scholar 

  30. Zhou, X. et al. Enhanced hole injection into amorphous hole-transport layers of organic light-emitting diodes using controlled p-type doping. Adv. Funct. Mater. 11, 310–314 (2001).

    Article  MATH  Google Scholar 

  31. Zhang, X. et al. Highly-efficient low-voltage organic light-emitting diode by controlling hole transporting with doped dual hole-transport layer and the impedance spectroscopy analysis. Synth. Met. 205, 134–138 (2015).

    Article  MATH  Google Scholar 

  32. Yadav, R. A. K., Dubey, D. K., Chen, S.-Z., Liang, T.-W. & Jou, J.-H. Role of molecular orbital energy levels in OLED performance. Sci. Rep. 10, 9915 (2020).

    Article  Google Scholar 

  33. Dou, J.-H. et al. Organic semiconducting alloys with tunable energy levels. J. Am. Chem. Soc. 141, 6561–6568 (2019).

    Article  MATH  Google Scholar 

  34. Aizawa, N. et al. Solution-processed multilayer small-molecule light-emitting devices with high-efficiency white-light emission. Nat. Commun. 5, 5756 (2014).

    Article  MATH  Google Scholar 

  35. Park, S., Kilgallon, L. J., Yang, Z., Ryu, D. Y. & Ryu, C. Y. Molecular origin of the induction period in photoinitiated cationic polymerization of epoxies and oxetanes. Macromolecules 52, 1158–1165 (2019).

    Article  MATH  Google Scholar 

  36. Park, H. W. et al. Universal route to impart orthogonality to polymer semiconductors for sub-micrometer tandem electronics. Adv. Mater. 31, 1901400 (2019).

    Article  Google Scholar 

  37. Yang, J. et al. Nondestructive photopatterning of heavy‐metal‐free quantum dots. Adv. Mater. 34, 2205504 (2022).

    Article  Google Scholar 

  38. Mehonic, A. et al. Structural changes and conductance thresholds in metal-free intrinsic SiOx resistive random access memory. J. Appl. Phys. 117, 124505 (2015).

    Article  MATH  Google Scholar 

  39. Bashouti, M. Y., Sardashti, K., Ristein, J. & Christiansen, S. Kinetic study of H-terminated silicon nanowires oxidation in very fast stages. Nanoscale Res. Lett. 8, 41 (2013).

    Article  Google Scholar 

  40. Louis, B., Caubergh, S., Larsson, P.-O., Tian, Y. & Scheblykin, I. G. Light and oxygen induce chain scission of conjugated polymers in solution. Phys. Chem. Chem. Phys. 20, 1829–1837 (2018).

    Article  Google Scholar 

  41. Kang, J.-W. et al. Low roll-off of efficiency at high current density in phosphorescent organic light emitting diodes. Appl. Phys. Lett. 90, 223508 (2007).

    Article  Google Scholar 

  42. Cha, S. W., Joo, S.-H., Jeong, M.-H. & Jin, H.-I. Balancing charge carrier mobility by constructing chemical structures to contain both hole- and electron-transporting moieties in electroluminescent organic compounds. Synth. Met. 150, 309–316 (2005).

    Article  Google Scholar 

  43. Liao, C.-H., Lee, M.-T., Tsai, C.-H. & Chen, C. H. Highly efficient blue organic light-emitting devices incorporating a composite hole transport layer. Appl. Phys. Lett. 86, 203507 (2005).

    Article  MATH  Google Scholar 

  44. Kim, J. et al. Interpenetrating polymer semiconductor nanonetwork channel for ultrasensitive, selective, and fast recovered chemodetection. ACS Appl. Mater. Interfaces 12, 55107–55115 (2020).

    Article  Google Scholar 

  45. Chua, L.-L. et al. General observation of n-type field-effect behaviour in organic semiconductors. Nature 434, 194–199 (2005).

    Article  MATH  Google Scholar 

  46. Brunner, K. et al. Carbazole compounds as host materials for triplet emitters in organic light-emitting diodes: tuning the HOMO level without influencing the triplet energy in small molecules. J. Am. Chem. Soc. 126, 6035–6042 (2004).

    Article  MATH  Google Scholar 

  47. Köhnen, A. et al. The simple way to solution‐processed multilayer OLEDs—layered block‐copolymer networks by living cationic polymerization. Adv. Mater. 21, 879–884 (2009).

    Article  MATH  Google Scholar 

  48. Tsai, K.-W., Hung, M.-K., Mao, Y.-H. & Chen, S.-A. Solution‐processed thermally activated delayed fluorescent OLED with high EQE as 31% using high triplet energy crosslinkable hole transport materials. Adv. Funct. Mater. 29, 1901025 (2019).

    Article  Google Scholar 

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Acknowledgements

D.H.K. acknowledges support from the Basic Science Research Program (2020R1A2C3014237 and RS-2024-00405818) and the Pioneer Research Center Program (2022M3C1A3081211) of the National Research Foundation of Korea (NRF) funded by the Ministry of Science and ICT, Korea and the Technology Innovation Program (RS-2024-00441743) funded by the Ministry of Trade, Industry & Energy (MOTIE, Korea). M.S.K. acknowledges support from the Basic Science Research Program (2021R1A2C2008332) and the Nano & Material Technology Development Program (RS-2024-00445116) of the NRF funded by the Ministry of Science and ICT, Korea.

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Contributions

M.S.K., J.H.C. and D.H.K. supervised this project. H.K., B.H. and D.H.K. conceived the concept. H.K., S.K. and B.H. designed and carried out the experiments. H.K., B.H., So.L., S.H.R., J.H. and D.H.K. analysed the molecular structure and etching behaviour of SI-HTL. H.K. and B.H. fabricated the high-resolution patterns of SI-HTL. S.K., Se.L., M.K., S.H.R., M.S.K. and J.H.C. evaluated and interpreted the optoelectronic characteristics of SI-HTL and OLEDs. H.K., S.K. and H.O. fabricated and evaluated the pixel crosstalk of patterned SI-HTL-based OLEDs. All authors discussed the results and commented on the paper. H.K., S.K., B.H., M.S.K., J.H.C. and D.H.K. co-wrote the paper.

Corresponding authors

Correspondence to Moon Sung Kang, Jeong Ho Cho or Do Hwan Kim.

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Competing interests

H.K., S.K., B.H., Se.L., M.S.K., J.H.C. and D.H.K. declare their status as inventors on the granted Korean patent (KR 10-2537611) and have filed the patent application (PCT/KR2023/009730). Additionally, H.K., B.H. and D.H.K. declare their status as inventors on the granted Korean patent (KR 10-2547153) and have filed the patent application (PCT/KR2023/002902). The other authors declare no competing interests.

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Electrical pixel crosstalk phenomenon as a function of SI-HTL pixelation.

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Kweon, H., Kim, S., Ha, B. et al. Microlithography of hole transport layers for high-resolution organic light-emitting diodes with reduced electrical crosstalk. Nat Electron 8, 66–74 (2025). https://doi.org/10.1038/s41928-024-01327-5

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